Fabrication of Nanopores in Silicon Chips Using Feedback Chemical Etching

Silicon nanopores (see image) are fabricated by feedback chemical etching. The electric current through a silicon chip separating a standard buffer from an etchant is monitored in the etching process such that the size of the nanopore can be controlled. This approach offers a simple method of fabricating solid-state nanopores for detecting and characterizing biomolecules.