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High Resolution Image Download MS PowerPoint Slide Membrane-based sensors are an important market for microelectromechanical systems (MEMS). Two-dimensional (2D) materials, with their low mass, are excellent candidates for suspended membranes to provide high sensitivity, small footprint sensors. The present work demonstrates pressure sensors employing large-scale-synthesized 2D platinum diselenide (PtSe 2 ) films as piezoresistive membranes supported only by a thin polymer layer. We investigate three different synthesis methods with contrasting growth parameters and establish a reliable high yield fabrication process for suspended PtSe 2 /PMMA membranes across sealed cavities. The pressure sensors reproducibly display sensitivities above 6 × 10 –4 kPa –1 . We show that the sensitivity clearly depends on the membrane diameter and the piezoresistive gauge factor of the PtSe 2 film. Reducing the total device size by decreasing the number of membranes within a device leads to a significant increase in the area-normalized sensitivity. This allows the manufacturing of pressure sensors with high sensitivity but a much smaller device footprint than the current state-of-the-art MEMS technology. We further integrate PtSe 2 pressure sensors with CMOS technology, improving the technological readiness of PtSe 2 -based MEMS and NEMS devices.
Lukas et al. (Wed,) studied this question.