A bossed diaphragm piezoresistive pressure sensor with a peninsula–island structure for the ultra-low-pressure range with high sensitivity, Zhao, Libo, Xu, Tingzhong, Hebibul, Rahman, Jiang, Zhuangde, Ding, Jianjun, Peng, Niancai, Guo, Xin, Xu, Yu, Wang, Hongyan, Zhao, Yulong
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Zhao et al. (2016) studied this question.
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