We report an electrothermally-actuated microlens scanner that is suitable for biomedical imaging applications. The microlens has a large tunable range and a low driving voltage, and the lens is made of glass. The enabling device is a new electrothermal actuator design that is capable of large vertical actuation (~0.9 mm) on a 3 mm device footprint, with small lateral shift (<; 7 μm) and tilting (<; 0.38°) at less than 4-V. The design, fabrication and characterization of the actuator are presented. Imaging results by the assembled microlens are also demonstrated.
No takes yet. Share an insight, caveat, or question.
Wu et al. (2010) studied this question.
Synapse has enriched 5 closely related papers on similar clinical questions. Consider them for comparative context: