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August 8, 2003Applied Physics Letters

Analysis of ultrathin SiO2 interface layers in chemical vapor deposition of Al2O3 on Si by in situ scanning transmission electron microscopy

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Authors

RKRobert F. KlieUniversity of Illinois SystemNBNigel D. BrowningAmes Research CenterACA. Roy ChowdhuriUniversity of Nebraska–Lincoln

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Klie et al. (2003) studied this question.

synapsesocial.com/papers/6a784fd798f24dbf64bdc3ddhttps://doi.org/10.1063/1.1597415
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