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December 20, 1999Applied Physics Letters

Evidence of aluminum silicate formation during chemical vapor deposition of amorphous Al2O3 thin films on Si(100)

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TKTonya M. KleinUniversity of AlabamaDNDongfang NiuNorth Carolina State UniversityWEWilliam S. EplingUniversity of Virginia

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Klein et al. (1999) studied this question.

synapsesocial.com/papers/6a765a810e0ba451881b52fchttps://doi.org/10.1063/1.125519
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