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April 1, 1990Journal of The Electrochemical SocietyOpen Access

Preparation and Properties of Ta2 O 5 Films by LPCVD for ULSI Application

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Authors

SZShigeaki ZaimaNagoya University TFTakeshi FurutaTEPCO (Japan)YYYukio YasudaForestry and Forest Products Research Institute

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Cite This Study

Zaima et al. (1990) studied this question.

synapsesocial.com/papers/6a7d65cdf1daba58ecd5b8ce https://doi.org/10.1149/1.2086651

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