Adjusting the Operating Voltage of an Nanoelectromechanical Relay Using Negative Capacitance

The operating voltage of a nanoelectromechanical (NEM) relay can be scaled down significantly using negative capacitance (NC), which is a unique property of ferroelectric materials. It has been observed that a ferroelectric capacitor can amplify the internal voltage of a device (higher than the externally applied voltage) by means of the NC effect. In this simulation work, depending on the structural parameters of a ferroelectric capacitor and an NEM relay, an NC + NEM relay (in which the gate electrode of the NEM relay is connected in series to the ferroelectric capacitor) was investigated. As a result, a sub-0.5-V operating voltage is theoretically estimated.