Single-crystalline cubic MgZnO films and their application in deep-ultraviolet optoelectronic devices

By employing a relatively low growth temperature and oxygen-rich conditions, single-crystalline cubic MgZnO films were prepared. A solar-blind deep ultraviolet (DUV) photodetector was finished on the MgZnO film. The maximum responsivity of the photodetector is 396 mA/W at 10 V bias, which is almost three orders of magnitude larger than the highest value ever reported in MgZnO-based solar-blind photodetectors. The dark current density is 1.5×10−11 A/cm2, comparable with the smallest value ever reported in solar-blind photodetectors. The improved performance reveals that the single-crystalline cubic MgZnO films have great potential applications in DUV optoelectronic devices.