Anatase TiO₂ Films with Dominant {001} Facets Fabricated by Direct-Current Reactive Magnetron Sputtering at Room Temperature: Oxygen Defects and Enhanced Visible-Light Photocatalytic Behaviors

A TiO2 film with dominant anatase {001} facets is directly prepared by direct-current reactive magnetron sputtering at room temperature without using morphology-controlling agents. The formation mechanism of anatase TiO2 films with dominant {001} facets is explained by the competition between thermodynamics and ion impinging in the deposition process. The crystalline TiO2 film shows a superior photocatalytic efficiency for the degradation of Rhodamine B under UV-visible (λ > 250 nm) lights. Furthermore, a comparable photodegradation of Rhodamine B is also found on the TiO2 film surface by using visible (λ > 420 nm) lights. During film growth, the surface bombarded by high energy of ions yields plenty of oxygen defects, which can enhance the photocatalytic activity of the films irradiated under visible light.