Data compilations: their use to improve measurement certainty in surface analysis by aes and xps

This is the authors' abstract. We don't add key points for this paper.

Data compliations are an integral and vital part of the development of the measurement scheme for surface analysis. They have three main functions that will be considered in this survey: (i) the provision of numerical values for use in calculations of quantitative surface analysis, (ii) the provision of unbiased data for the development of theory, and (iii) the establishment of a benchmark to judge the value of current research. A brief review will be made of practical data relating to AES and XPS instruments; electron guns, x‐ray sources, spectrometers and detectors. Next, data compilations of experimental measurements of relative sensitivity factors, attenuation lengths and backscattering factors will be contrasted. Finally, theoretically derived data banks of cross sections, inelastic mean free paths, asymmetry parameters, etc will be considered and conclusions drawn of the need for further work.