Atomic Layer Etching: An Industry Perspective

This paper provides an industry perspective on atomic layer etching (ALEt) process. Two process sequences representing two different methods of ALEt are described, followed by several examples where ALEt can be an enabling process technology in the semiconductor industry. The authors believe that there needs to be an increased understanding of surface functionalization, modification and chemistry-based material removal. We are confident that this review article will allow for increased scientific and technological solutions for enabling ALEt.