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February 14, 1994Applied Physics Letters

Reactive ion etching of GaN using BCl3

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Authors

MLMao LinUniversity of Illinois Urbana-ChampaignZFZhaoyan FanCedars-Sinai Medical CenterZMZhongqi MaXizang Minzu University

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Lin et al. (1994) studied this question.

synapsesocial.com/papers/6a7c5f34e7cf49620a26bcfbhttps://doi.org/10.1063/1.110985
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