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April 1, 1976Journal of Applied Physics

Highly-oriented ZnO films by rf sputtering of hemispherical electrode system

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Authors

KOKenzo OhjiPanasonic (Japan)TTTakao TohdaPanasonic (Japan)KWKiyotaka WasaInstitute of Acoustics

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Ohji et al. (1976) studied this question.

synapsesocial.com/papers/6a7ca37280d29ce2cbfab3e3https://doi.org/10.1063/1.322761
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