Highly oriented AlN thin films were prepared on polycrystalline MoSi2 substrates by rf magnetron sputtering. The films responded to mechanical impact and produced voltage. The maximum produced voltage increased almost linearly with the impact intensity. Furthermore, the capacitance of the films increased almost linearly with applied pressure, indicating that the films can measure the pressure. The films responded to thermal shock. These results suggested that the films possessed various functions like human skin.
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Akiyama et al. (1995) studied this question.
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