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September 28, 2001Reports on Progress in PhysicsOpen Access

Micromachined infrared detectors based on pyroelectric thin films

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PMPaul Muralt

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Paul Muralt (2001) studied this question.

synapsesocial.com/papers/6a7cd2354d80a05d681e6d95https://doi.org/10.1088/0034-4885/64/10/203
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