This paper reports the characterization of barrier‐type anodic oxide films on aluminium by means of spectroscopic ellipsometry. In order to show the capabilities of the technique for quantitative determination of the layer characteristics such as thickness, composition and interface structure, results based on ellipsometric data are correlated with results from transmission electron microscopy and Auger electron spectroscopy. Especially if measures are performed at multiple angles of incidence, ellipsometry allows an accurate determination of the thickness and the interfacial properties of the barrier layer.
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Laet et al. (1992) studied this question.
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