Low-power thermo-optic silicon modulator for large-scale photonic integrated systems

silicon footprint of a commercial foundry silicon photonics process. The optical modulator consumes 2.56 mW for 180° phase modulation over 100-nm optical bandwidth while achieving 1.23-dB optical loss without air-gap trench or silicon undercut post-processing. Geometrical design optimization, at the core of this demonstration, is applicable to the realization of compact thermo-optic devices for large-scale programmable photonic integrated systems, with a potential to reduce power consumption roughly by an order of magnitude without sacrificing scalability and optical modulation bandwidth.