Multichannel Microchemical Reactor Comprising Replica-Molded Microplasma Devices: Chemiluminescence and Sulfur Deposition in Ar/CS₂ Flows

Microchemical reactors consisting of parallel linear arrays of interconnected cylindrical microcavity plasma devices have been fabricated by replica molding in ultraviolet-curable polymer. Tests of 10 times 10 arrays of 400-mum-diameter devices with 125-mum-wide gas flow channels have been conducted in rare gas and Ar/CS2flows and excitation of the array with a sinusoidal voltage. Visible chemiluminescence (lambda ~ 505 nm) resulting from the A tilde rarr X tilde transition of CS2+and the deposition of a (C-S)nmicrostructured polymer have been observed in the Ar/CS2 flow experiments.