A novel rf microplasma jet was successfully generated at atmospheric pressure using a single-tube electrode. Preliminary results of the application of the microplasma jet to the synthesis of carbon microstructures using a CH 4 and Ar mixture are presented with the following variables: the inner hole diameter of the needle tube electrode, the flow rate of methane, and substrate temperature. Carbon microstructures such as diamond particles, carbon nanowires, carbon nanotubes and cone-shaped crystalline Si, were synthesized with wide surface distributions by adjusting the deposition parameters. The relationship between the plasma state and the silicon and carbon microstructures and their surface distribution is demonstrated.
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Yang et al. (2005) studied this question.
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