Mass spectrometric detection of S₂F and S₂F₂in SF₆-¹⁸O₂RF discharges

In SF 6 - 18 O 2 discharges, mass spectrometric studies have clearly shown the presence of S 2 F and S 2 F 2 molecules in the case of the use of fluorine consuming materials. Reaction schemes are proposed to explain the formation of S 2 F and S 2 F 2 molecules. These reaction paths also lead to the S 2 molecule.