Wet thermal oxidation of a strained balanced superlattice structure, epitaxially grown on InP and including high Al content layers, is investigated. The oxidation kinetics are studied as a function of temperature and oxidation duration. The results are interpreted with a simple diffusion model. We propose use of this structure as a confining layer for monolithic long wavelength vertical cavity surface emitting lasers.
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Legay et al. (1999) studied this question.
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