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April 30, 2003Japanese Journal of Applied Physics

A Sealing Technique for Stacking MEMS on LSI Using Spin-Coating Film Transfer and Hot Pressing

Norio Sato Satoshi Shigematsu Hiroki Morimura Toshikazu Kamei Kazuhisa Kudou Masaki Yano Katsuyuki Machida Hakaru Kyuragi

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Abstract

A Sealing Technique for Stacking MEMS on LSI Using Spin-Coating Film Transfer and Hot Pressing, Sato, Norio, Ishii, Hiromu, Shigematsu, Satoshi, Morimura, Hiroki, Kamei, Toshikazu, Kudou, Kazuhisa, Yano, Masaki, Machida, Katsuyuki, Kyuragi, Hakaru

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Cite This Study

Sato et al. (2003) studied this question.

synapsesocial.com/papers/6a7dd2e89c5f03601cb87208 https://doi.org/10.1143/jjap.42.2462

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