Study of Cerium Dioxide Thin Films by X-ray Photoelectron Spectroscopy

X-ray photoelectron spectroscopy measurements of cerium dioxide thin films have been performed. The samples were prepared by chemical vapor deposition (CVD) using Ce(dpm)4 (Hdpm = 2,2,6,6-tetramethyl-3,5-heptanedione) as precursor on alumina and glass substrates. In this work, the spectra of the principal core levels for a CeO2 film on glass are presented. The Ce 3d photopeak has the typical structure of Ce(IV) compounds. By deconvolution of the O 1s signal, the presence of –OH groups and adsorbed water are evidenced. Sputtering treatments confirm that carbon contamination is limited to the outermost layers, while resulting hydrated species are bonded tenaciously to the oxide network.