Reactively sputtered nitrides and carbides of titanium, zirconium, and hafnium

William D. Sproul

doi:10.1116/1.573651

November 1, 1986Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Reactively sputtered nitrides and carbides of titanium, zirconium, and hafnium

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Views Icon Views Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Icon Share Twitter Facebook Reddit LinkedIn Tools Icon Tools Reprints and Permissions Cite Icon Cite Search Site Citation William D. Sproul; Reactively sputtered nitrides and carbides of titanium, zirconium, and hafnium. J. Vac. Sci. Technol. A 1 November 1986; 4 (6): 2874–2878. https://doi.org/10.1116/1.573651 Download citation file: Ris (Zotero) Reference Manager EasyBib Bookends Mendeley Papers EndNote RefWorks BibTex toolbar search Search Dropdown Menu toolbar search search input Search input auto suggest filter your search All ContentAVS: Science & Technology of Materials Interfaces and ProcessingJournal of Vacuum Science & Technology A Search Advanced Search |Citation Search

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William D. Sproul (1986) studied this question.

synapsesocial.com/papers/6a7e68569094135e0b3c3f5d https://doi.org/10.1116/1.573651

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Reactively sputtered nitrides and carbides of titanium, zirconium, and hafnium

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Discussion

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Reactively sputtered nitrides and carbides of titanium, zirconium, and hafnium

Abstract

Discussion

Cite This Study

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