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A soft x-ray spectromicroscope for scanning transmission x-ray microscopy (STXM) and scanning photoelectron microscopy (SPEM) has been installed at the first undulator-radiation beamline at the Pohang Light Source. The spatial resolution of the spectromicroscope is 0.4 μm in the vertical direction and 0.5 μm in the horizontal direction, with a focused photon flux of 5×107–1×108 photons/s. The operational energy ranges for the STXM and the SPEM are 250–1000 eV and 400–1000 eV, respectively, with spectral resolving power of 1000–3000. The setup details of the spectromicroscope and the SPEM application results of semiconductor devices are presented.
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Lee et al. (2001) studied this question.
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