A mixture of 5% O2 in He has been used in a rf discharge at pressures from 15 to 70 Torr to produce a free jet source of a high intensity energetic beam of atomic oxygen. Intensities of 1017 atoms/sec/sr are predicted and energies of 0.33 eV have been measured. A time-of-flight analysis of the beam properties is presented and indicates that the source temperature is near 620 K.
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Miller et al. (1969) studied this question.
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