Fabrication of Highly Crystalline Corundum-Structured α-(Ga1-xFex)₂O₃Alloy Thin Films on Sapphire Substrates

Highly crystalline corundum-structured α-(Ga 1- x Fe x ) 2 O 3 alloy thin films were fabricated on c -plane sapphire substrates by using a mist chemical vapor deposition method. The full-widths at half maximum of X-ray diffraction rocking curves were smaller than 100 arcsec for the entire range of x from 0 to 1. Optical band gaps were artificially tuned to a value between those of α-Ga 2 O 3 and α-Fe 2 O 3 , that is, 2.2 and 5.3 eV with changing the Fe content x in the films. Magnetic measurements revealed ferromagnetic properties of a α-(Ga 1- x Fe x ) 2 O 3 ( x = 0.24) thin film at 110 K.