Elemental materials that condense on surfaces near effusion cells can be reevaporated toward substrates when heated by radiation from effusion furnaces. There they accumulate as unwanted impurities at interfaces and distribute throughout epitaxial films during growth. This effect is greatly increased when shutters are closed. Re-evaporated aluminum is shown to degrade minority-carrier properties of Al0.3Ga0.7As/GaAs double heterostructures. Modified temperature schedules and hardware to reduce re-evaporation effects are suggested.
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Wood et al. (1993) studied this question.
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