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January 15, 1991Journal of Applied Physics

Modeling inductively coupled plasmas: The coil current boundary condition

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BYBenjamin W. YuSGSteven L. GirshickUniversity of Minnesota System

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Yu et al. (1991) studied this question.

synapsesocial.com/papers/6a80ab2cc48c717e4deec3f4https://doi.org/10.1063/1.347345
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  1. 1The effect of coil design on materials synthesis in an inductively coupled plasma torch1988 · 61 citations
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  3. 3Induction-Coupled Plasma Torch1961 · 433 citations