A pulsating combustion was found to continue successively, after a mixture of flowing SiH 4 /He and O 2 was ignitied by appropriate means in a Pyrex vessel at a total pressure of ca. 400 Pa. Light emission in the UV and visible region was spectroscopically resolved to be composed of band emissions of SiO(-) and OH(-), as well as a broad emission in the visible region. These findings were discussed from the mechanistic viewpoints of silane combustion and chemical vapor deposition of SiO 2 films.
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Suga et al. (1988) studied this question.
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