High-Sensitivity Sensor of Low Relative Humidity Based on Overlay on Side-Polished Fibers

A low relative humidity (RH) sensor based on overlay on side-polished fiber is presented. The evanescent field from a single-mode optical fiber is coupled to a TiO/sub 2/ waveguide overlay. The transmission response exhibits sharp resonances whose central wavelengths are linearly shifted with RH. This behavior is due to the porous columnar nanostructure of the TiO/sub 2/ film. The water is adsorbed in the pores of the nanostructure changing the refractive index of the layer and causing a shift of the wavelength resonances. The response of the sensor is determined by the shape and size of the pores. The optical fiber evanescent field sensor developed has a linear response and high sensitivity (0.5 nm/% RH) for low RH (RH/spl sim/0%-15%) at 26.1/spl deg/C/spl plusmn/0.6/spl deg/C. The lack of hysteresis in the adsorption-desorption cycle has been checked. The development of a sensor with tailored response is envisaged using properly techniques to control the porosity of the material.