Scanning thermal microscopy (SThM) has been used for the visualization and characterization of an ultrathin plasma polymer film of perfluoro(methylcyclohexane) at a submicrometer level. The morphology, molecular dynamics, and lateral homogeneity of the ultrathin film have all been examined precisely with SThM. The growth of the plasma polymer film on a silicon wafer (Si‐wafer) has also been precisely determined using a new burning‐hole technique.
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Dutta et al. (2005) studied this question.
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