Polarization mode selective channel waveguides in an InGaAs/InP disordered superlattice

Optical channel waveguides which can selectively confine transverse electric and transverse magnetic modes were successfully fabricated in an InGaAs/InP superlattice disordered by Si3N4 cap annealing. The extinction ratio of mode selectivity was found to be 13 dB in both single-mode channel waveguides at the 1.52 μm wavelength. The induced variation in refractive indices by disordering is estimated to be 1–2×10−3.