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We have detected 5.9 keV X-rays with Nb/AlO x /Nb superconducting tunnel junctions which are resistant to thermal cycling. Using an anodization method to fabricate the junctions, X-ray signals could be detected. We propose an experimental method to determine the fundamental limit of energy resolution which comes from the statistical fluctuation of signal charges. The limit obtained for one of our samples was smaller than 135 eV for 5.9 keV radiation.
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Kurakado et al. (1989) studied this question.
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