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The morphologies of single height atomic steps were studied on Si(001) samples with a miscut of {~}0^∘{}--0.05^∘{} using dark-field low-energy electron microscopy. In addition to the previously observed wavy step phase we identify a ``hilly'' phase at miscut angles 0.03^∘{}. This phase exhibits steps in excess of those required by the local miscut, but their morphology is qualitatively different from the straight steps predicted by theory.
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Tromp et al. (1993) studied this question.
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