Answers are grounded in this paper and cite their sources.
The behavior of dual frequency capacitively coupled plasmas is investigated. Assuming a realistic reactor configuration represented by effective geometry factors and taking into account two separate sinusoidal voltage sources operating at different frequencies, an ordinary differential equation is derived which describes the nonlinear dynamics of such discharges. An exact analytical solution of the equation is presented and employed for a parameter study of the discharge current characteristics. Simulation results for various gas pressures (=various electron-neutral collision rates), various amplitude ratios of the two independent rf sources, and various integer frequency ratios are shown. When the two frequencies are comparable, surprising nonlinear effects are observed. Particular under study is the heating at the plasma series resonance, either by direct excitation or via the nonlinear electron resonance heating mechanism.
No takes yet. Share an insight, caveat, or question.
Mussenbrock et al. (2006) studied this question.
Synapse has enriched 10 related papers. Consider them for comparative context: