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February 15, 1993Journal of Applied Physics

Optical ion energy measurements in a radio-frequency-induction plasma source

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Authors

JOJames A. O’NeillEntegris (United States)MBMichael BarnesUniversity of OxfordJKJohn H. KellerAustralian National University

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O’Neill et al. (1993) studied this question.

synapsesocial.com/papers/6a82fb2df2457b8164efdd03https://doi.org/10.1063/1.353195
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