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January 28, 2015Optics ExpressOpen Access

Development of a grating-based interferometer for six-degree-of-freedom displacement and angle measurements

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HHHung-Lin HsiehNational Taiwan University of Science and TechnologySPSsu-Wen PanNational Taiwan University of Science and Technology

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Hsieh et al. (2015) studied this question.

synapsesocial.com/papers/6a830a5d191215dee0b37ec0https://doi.org/10.1364/oe.23.002451
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