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March 7, 2003Measurement Science and Technology

Uncertainty in pitch measurements of one-dimensional grating standards using a nanometrological atomic force microscope

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Authors

IMIchiko MisumiNational Institute of Advanced Industrial Science and TechnologySGSatoshi GondaNational Institute of Advanced Industrial Science and TechnologyTKTomizo KurosawaJapan Organization for Metals and Energy Security (Japan)

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Misumi et al. (2003) studied this question.

synapsesocial.com/papers/6a830b86a250d11ff44cd2a1https://doi.org/10.1088/0957-0233/14/4/309
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