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November 1, 1994Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

Design of an atomic force microscope with interferometric position control

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JSJ. SchneirNational Institute of Standards and TechnologyTMThomas H. McWaidJAJohn AlexanderStockholm University

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Schneir et al. (1994) studied this question.

synapsesocial.com/papers/6ab5e12d11ffef926e20b77dhttps://doi.org/10.1116/1.587471
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