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April 5, 1968Physical Review

Calculation of Ion Bombarding Energy and Its Distribution in rf Sputtering

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RTR. T. C. TsuiIBM Research - Thomas J. Watson Research Center

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R. T. C. Tsui (1968) studied this question.

synapsesocial.com/papers/6a830d63f2457b8164efe51ehttps://doi.org/10.1103/physrev.168.107
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