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ToF‐SIMS spectra are formed by bombarding a surface with a pulse of primary ions and detecting the resultant ionized surface species using a time‐of‐flight mass spectrometer. Typically, the detector is a time‐to‐digital converter. Once an ion is detected using such detectors, the detector becomes insensitive to the arrival of additional ions for a period termed as the (detector) dead‐time. Under commonly used ToF‐SIMS data acquisition conditions, the time interval over which ions arising from a single chemical species reach the detector is on the order of the detector dead‐time. Thus, only the first ion reaching the detector at any given mass is counted. The event registered by the data acquisition system, then, is the arrival of one or more ions at the detector. This behavior causes ToF‐SIMS data to violate, in the general case, the assumption of linear additivity that underlies many multivariate statistical analysis techniques. In this article, we show that high‐mass‐resolution ToF‐SIMS spectral‐image data follow a generalized linear model, and we propose a data transformation and scaling procedure that enables such data sets to be successfully analyzed using standard methods of multivariate image analysis.
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Keenan et al. (2008) studied this question.
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