Metal Loaded Zeolite Adsorbents for Phosphine Removal

Phosphine (PH 3 ) is a highly toxic air pollutant commonly used in the semiconductor and optoelectronic industries, but it has received less research attention due to its handling difficulty. In this study, metal (Cu, Zn, or Mn) loaded ZSM-5 and Y zeolite adsorbents are first prepared for the adsorption of PH 3 toxic gas. The physical and chemical properties of the adsorbents which influence the PH 3 adsorption capacity are analyzed. The results show that >99% PH 3 adsorption efficiency is achieved when zeolites are loaded with Cu. The maximal PH 3 adsorption capacities are about the same for both zeolites at 1.9 mol of PH 3 /mol of Cu, which occurs at similar Cu loaded mass of 3.0−3.5%, beyond which the decrease in specific surface area is the major factor responsible for the decrease of PH 3 adsorption capacity. The maximum adsorption capacity per loaded metal mass is much higher than literature data using CuO only for adsorbing hydride gases.