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July 15, 1991Journal of Applied Physics

Oxygen and fluorine atom kinetics in electron cyclotron resonance plasmas by time-resolved actinometry

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Authors

JBJean‐Paul BoothCentre National de la Recherche ScientifiqueNSN. SadeghiUniversité Paris-Sud

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Booth et al. (1991) studied this question.

synapsesocial.com/papers/6a8351e3b95cf4e61630e3d6https://doi.org/10.1063/1.349662
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