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Atomic images of hydrogen-saturated Si(100) surface have been successfully observed by scanning tunneling microscope in ultra high vacuum. Prolonged exposures of Si(100) surface to atomic hydrogen irradiation have produced ordered hydrogen-terminated structures such as the (1×1) dihydride phase, and the (3×1) structure which was comprised of the dihydride and (2×1) monohydride phases alternately repeated. Domains of the (3×1) phase separated by anti-phase boundaries were also observed on a given (100) terrace.
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Okada et al. (1992) studied this question.
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