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December 1, 1994Japanese Journal of Applied Physics

Trends for Future Silicon Technology

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TOTadahiro Ohmi Tadahiro OhmiTohoku University

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Tadahiro Ohmi Tadahiro Ohmi (1994) studied this question.

synapsesocial.com/papers/6a83600a37077a15cfa33ea5https://doi.org/10.1143/jjap.33.6747
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