Characteristics of impact-ionization current in the advanced self-aligned polysilicon-emitter bipolar transistor

Using an algorithm to calculate the base current increase due to local thermal effects, the authors show that one can accurately measure the impact ionization current over the full range of collector current. From the measured impact ionization ratio, it was possible to quantitatively describe the characteristics of the space-charge modulation and base push-out effect over a wide range of collector current. Computer simulation results support the measured data. It is also shown that one can use the measured impact ionization ratio to distinguish small collector concentration variations and thickness differences. The characterization was performed for self-aligned polysilicon-emitter transistors in an advanced BiCMOS technology.>