Preparation and Properties of Si Microcrystals Embedded in SiO₂ Glass Films

Si microcrystals were successfully doped into SiO 2 glass films by the rf magnetron sputtering technique. The dependence of the average size of Si microcrystals on substrate temperature was discussed with reference to transmission electron microscopy observations. The optical absorption spectra of Si microcrystals clearly exhibited the blue shift compared with a bulk Si crystal, which seems to be due to a quantum size effect.