Thin parylene films have been prepared and are available in thicknesses to 0.025 μ. The parylene polymers are shown to be extremely uniform in thickness, have good gas barrier properties, and are relatively nonabsorbing throughout the entire soft x-ray region. Comparisons are made with commercially available Mylar, polycarbonate, polypropylene, VYNS, and Formvar.
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Mark Spivack (1970) studied this question.
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